Temperature Application Highlights

There are many unique procedures with metal, ceramic, and semiconductor substrates that require the use of a vacuum chamber. Typically these procedures are used to change and enhance the characteristics of the material and can involve a variety of heating techniques ranging from lasers, various plasmas, and magnetic fields. Common examples of these procedures include Ion Nitriding for the hardening of metals, and Chemical Vapor Deposition for the coating of substrates. Due to the complexity of these procedures, temperature process control is often critical and requires careful selection of the proper temperature sensor.

Solution
Williamson’s high-performance dual-wavelength sensors are frequently used to provide unequalled performance for accurate and repeatable temperature measurements on vacuum chamber applications. These unique sensors provide automatic alignment to the hottest temperature viewed as well as effective measurements when viewing through a dirty window or plasma or when measuring a surface with varying emissivity. Measurements can be made through a window or from within the chamber using a fiber optic vacuum bushing option.

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